Preheat oven to 400°F.
Line 2 baking sheets with parchment paper.
In the bowl of a large food processor, pulse the flour, sugar, baking powder, sea salt, butter, and cinnamon until combined.
In a small bowl, whisk together the eggs, yogurt, vanilla, and mascarpone. Add to the dry ingredients and pulse until combined.
Place into a large bowl and fold in the blueberries with a spatula, turning to incorporate.
Using a large (1/4-1/3 cup) scoop, scoop out the dough and place evenly spaced on the 2 baking sheets.
Bake at 400°F for 15-18 minutes until golden and set.
Cool on baking racks.